W200-SEMI

Shyre’s W200 automated cleaning system was developed specifically for the semiconductor industry.

The W200 is a wet bench tool designed to meet the stringent requirements of the semiconductor manufacturing processes; the system provides a reliable and cost-effective solution for cleaning and preparation of wafers and other sensitive components during production.

Overview

The W200 features a closed-loop cleaning system with an integrated filtration systems that minimise the risk of contamination. It is also equipped with an advanced control system to ensure repeatable and reliable operation. In addition, it is certified to meet the SEMI standards for maximum safety and reliability and comes with SECS GEM integration of control, monitoring and reporting functions.

Key Features

Custom Tooling Design
Clean room integration
Wide range of customisation options
Batch and status data capture and reporting
SECS- GEM integration; control and monitoring
Certification to SEMI standards
Full Hardware and Process Support

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This Product

W200-SEMI

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